Microelectromechanical systems (MEMS) have played an increasingly important role in sensor and actuator applications. And its key contribution is that it has enabled the integration of multi-components (i.e., electronics, mechanics, fluidics and etc) on a single chip and their integration has positive effects upon performance, reliability and cost. Compared to conventional electrostatic, thermal or magnetic actuating schemes, piezoelectric MEMS inkjet has the advantages of lower power consumptio