Principles and Applications of NanoMEMS Physics

Principles and Applications of NanoMEMS Physics MICROSYSTEMS Series Editor Stephen D. Senturia Massachusetts Institute of Technology Editorial Board Roger T. Howe, University of California, Berkeley D. Jed Harrison, University of Alberta Hiroyuki Fujita, University of Tokyo Jan-Ake Schweitz, Uppsala University OTHER BOOKS IN THE SERIES: x x x x x x x x x x Optical Microscanners and Microspectrometers Using Thermal Bimorph Actuators Series: Microsystems, Vol. 14 Lammel, Gerhard, Schweizer, Sandra, Renaud, Philippe 2002, 280 p., Hardcover, ISBN: 0-7923-7655-2 Optimal Synthesis Methods for MEMS Series: Microsystems, Vol. 13 Ananthasuresh, S.G.K. (Ed.) 2003, 336 p., Hardcover, ISBN: 1-4020-7620-7 Micromachined Mirrors Series: Microsystems, Vol. 12 Conant, Robert 2003, XVII, 160 p., Hardcover, ISBN: 1-4020-7312-7 Heat Convection in Micro Ducts Series: Microsystems, Vol. 11 Zohar, Yitshak 2002, 224 p., Hardcover, ISBN: 1-4020-7256-2 Microfluidics and BioMEMS Applications Series: Microsystems, Vol. 10 Tay, Francis E.H. (Ed.) 2002, 300 p., Hardcover, ISBN: 1-4020-7237-6 Materials & Process Integration for MEMS Series: Microsystems, Vol. 9 Tay, Francis E.H. (Ed.) 2002, 300 p., Hardcover, ISBN: 1-4020-7175-2 Scanning Probe Lithography Series: Microsystems, Vol. 7 Soh, Hyongsok T., Guarini, Kathryn Wilder, Quate, Calvin F. 2001, 224 p., Hardcover ISBN: 0-7923-7361-8 Microscale Heat Conduction in Integrated Circuits and Their Constituent Films Series: Microsystems, Vol. 6 Sungtaek Ju, Y., Goodson, Kenneth E. 1999, 128 p., Hardcover, ISBN: 0-7923-8591-8 Microfabrication in Tissue Engineering and Bioartificial Organs Series: Microsystems, Vol. 5 Bhatia, Sangeeta 1999, 168 p., Hardcover, ISBN: 0-7923-8566-7 Micromachined Ultrasound-Based Proximity Sensors Series: Microsystems, Vol. 4 Hornung, Mark R., Brand, Oliver 1999, 136 p., Hardcover, ISBN: 0-7923-8508-X Principles and Applications of NanoMEMS Physics by Héctor J. De Los Santos NanoMEMS Research LLC, Irvine, CA, USA AC.I.P. Catalogue record for this book is available from the Library of Congress. ISBN 10 1-4020-3238-2 (HB) ISBN 13 978-1-4020-3238-7 (HB) ISBN 10 0-387-25834-5 ( e-book) ISBN 13 978-0-387-25834-8 (e-book) Published by Springer, P.O. Box 17, 3300 AA Dordrecht, The Netherlands. www.springeronline.com Printed on acid-free paper All Rights Reserved © 2005 Springer No part of this work may be reproduced, stored in a retrieval system, or transmitted in any form or by any means, electronic, mechanical, photocopying, microfilming, recording or otherwise, without written permission from the Publisher, with the exception of any material supplied specifically for the purpose of being entered and executed on a computer system, for exclusive use by the purchaser of the work. Printed in the Netherlands. ... - tailieumienphi.vn