An Introduction to Microelectromechanical Systems Engineering P1
An Introduction to Microelectromechanical Systems Engineering P1
For a listing of recent titles in the Artech House Microelectromechanical Systems (MEMS) Series, turn to the back of this book. .An Introduction to Microelectromechanical Systems Engineering Second Edition Nadim Maluf Kirt Williams Artech House, Inc. Boston • London www.artechhouse.com .Library of Congress Cataloging-in-Publication Data A catalog record for this book is available from the U.S. Library of Congress. British Library Cataloguing in Publication Data Maluf, Nadim. An Introduction to m