An Introduction to MEMS Engineering 2nd(Artech) - MALUF
An Introduction to MEMS Engineering 2nd(Artech) - MALUF
In those early, heady, exciting, and terribly uncertain days, many issues faced those in the nascent field that researchers today would find hard to remember. For example, our hearty band constantly worried if any scholarly journal would publish the papers we wrote. Sources of research funding were hard to find and difficult to maintain. MEMS fabrication was itself a major issue.