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MICROMACHINING TECHNIQUES FOR FABRICATION OF MICRO AND NANO STRUCTURES
Edited by Mojtaba Kahrizi
Micromachining Techniques for Fabrication of Micro and Nano Structures Edited by Mojtaba Kahrizi
Published by InTech
Janeza Trdine 9, 51000 Rijeka, Croatia
Copyright © 2011 InTech
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Publishing Process Manager Oliver Kurelic Technical Editor Teodora Smiljanic
Cover Designer InTech Design Team
First published January, 2012 Printed in Croatia
A free online edition of this book is available at www.intechopen.com Additional hard copies can be obtained from orders@intechweb.org
Micromachining Techniques for Fabrication of Micro and Nano Structures, Edited by Mojtaba Kahrizi
p. cm.
ISBN 978-953-307-906-6
free online editions of InTech Books and Journals can be found at www.intechopen.com
Contents
Preface IX
Chapter 1
Chapter 2
Focused Ion Beam Based
Three-Dimensional Nano-Machining 1
Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim
Miniature Engineered Tapered Fiber Tip Devices by Focused Ion Beam Micromachining 17
Fei Xu, Jun-long Kou, Yan-qing Lu and Wei Hu
Chapter 3 Fundamentals of Laser Ablation
of the Materials Used in Microfluiducs 35 Tai-Chang Chen and Robert Bruce Darling
Chapter 4 Microwave Meta-Material Absorbers
Utilizing Laser Micro-Machining Technology 61 Hongmin Lee
Chapter 5 Laser Micromachining and Micro-Patterning with a Nanosecond UV Laser 85
Xianghua Wang, Giuseppe Yickhong Mak and Hoi Wai Choi
Chapter 6
Chapter 7
Chapter 8
Laser Ablation for Polymer Waveguide Fabrication 109 Shefiu S. Zakariyah
Micro Eletro Discharge Milling for Microfabrication 131 Mohammad Yeakub Ali, Reyad Mehfuz,
Ahsan Ali Khan and Ahmad Faris Ismail
Mechanical Micromachining by Drilling, Milling and Slotting 159 T. Gietzelt and L. Eichhorn
Chapter 9 ReleaseOptimizationofSuspendedMembranesinMEMS 183 Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca,
Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal
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