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The Gauge Block Handbook by Ted Doiron and John Beers Dimensional Metrology Group Precision Engineering Division National Institute of Standards and Technology Preface The Dimensional Metrology Group, and its predecessors at the National Institute of Standards and Technology (formerly the National Bureau of Standards) have been involved in documenting the science of gauge block calibration almost continuously since the seminal work of Peters and Boyd in 1926 [1]. Unfortunately, most of this documentation has been in the form of reports and other internal documents that are difficult for the interested metrologist outside the Institute to obtain. On the occasion of the latest major revision of our calibration procedures we decided to assemble and extend the existing documentation of the NIST gauge block calibration program into one document. We use the word assemble rather than write because most of the techniques described have been documented by various members of the Dimensional Metrology Group over the last 20 years. Unfortunately, much of the work is spread over multiple documents, many of the details of the measurement process have changed since the publications were written, and many large gaps in coverage exist. It is our hope that this handbook has assembled the best of the previous documentation and extended the coverage to completely describe the current gauge block calibration process. Many of the sections are based on previous documents since very little could be added in coverage. In particular, the entire discussion of single wavelength interferometry is due to John Beers [2]; the section on preparation of gauge blocks is due to Clyde Tucker [3]; the section on the mechanical comparator techniques is predominantly from Beers and Tucker [4]; and the appendix on drift eliminating designs is an adaptation for dimensional calibrations of the work of Joseph Cameron [5] on weighing designs. They have, however, been rewritten to make the handbook consistent in style and coverage. The measurement assurance program has been extensively modified over the last 10 years by one of the authors (TD), and chapter 4 reflects these changes. We would like to thank Mr. Ralph Veale, Mr. John Stoup, Mrs. Trish Snoots, Mr. Eric Stanfield, Mr. Dennis Everett, Mr. Jay Zimmerman, Ms. Kelly Warfield and Dr. Jack Stone, the members of the Dimensional Metrology Group who have assisted in both the development and testing of the current gauge block calibration system and the production of this document. TD and JSB 1 CONTENTS Page Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 1. Length 1.1 The meter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 1.2 The inch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2. Gauge blocks 2.1 A short history of gauge blocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2.2 Gauge block standards (U.S.). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 2.2.1 Scope . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 2.2.2 Nomenclature and definitions . . . . . . . . . . . . . . . . . . . . . . . 10 2.2.3 Tolerance grades . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 2.2.4 Recalibration requirements . . . . . . . . . . . . . . . . . . . . . . . . . 14 2.3 International standards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15 3. Physical and thermal properties of gauge blocks 3.1 Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17 3.2 Flatness and parallelism 3.2.1 Flatness measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 3.2.2 Parallelism measurement . . . . . . . . . . . . . . . . . . . . . . . . . 19 3.3 Thermal expansion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 3.3.1 Thermal expansion of gauge block materials . . . . . . . . . . . 23 3.3.2 Thermal expansion uncertainty . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 3.3 Elastic properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 3.4.1 Contact deformation in mechanical comparisons . . . . . . . 30 3.4.2 Measurement of probe force and tip radius . . . . . . . . . . . . 32 3.5 Stability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 2 4. Measurement assurance programs 4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36 4.2 A comparison: traditional metrology vs measurement assurance programs 4.2.1 Tradition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ... . . . . . . . 36 4.2.2 Process control: a paradigm shift . . . . . . . . . . . . . . . . . . . . 37 4.2.3 Measurement assurance: building a measurement process model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 4.3 Determining Uncertainty 4.3.1 Stability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 4.3.2 Uncertainty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 4.3.3 Random error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 4.3.4 Systematic error and type B uncertainty . . . . . . . . . . . . . . 43 4.3.5 Error budgets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 4.3.6 Combining type A and type B uncertainties . . . . . . . . . . . 47 4.3.7 Combining random and systematic errors . . . . . . . . . . . . . 48 4.4 The NIST gauge block measurement assurance program 4.4.1 Establishing interferometric master values . . . . . . . . . . . . . 50 4.4.2 The comparison process . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53 4.4.2.1 4.4.2.2 4.4.2.3 4.4.2.4 4.4.2.5 4.4.2.6 Measurement schemes - drift eliminating designs . . . . . . . . . . . . . . . . . . . . 54 Control parameter for repeatability . . . . . . . . 57 Control test for variance . . . . . . . . . . . . . . . . . 59 Control parameter (S-C). . . . . . . . . . . . . . . . . 60 Control test for (S-C), the check standard . . . 63 Control test for drift . . . . . . . . . . . . . . . . . . . . . 64 4.4.3 Calculating total uncertainty . . . . . . . . . . . . . . . . . . . . . . . . . . 64 4.5 Summary of the NIST measurement assurance program . . . . . . . . . . . 66 3 5. The NIST mechanical comparison procedure 5.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68 5.2 Preparation and inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68 5.2.1 Cleaning procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68 5.2.2 Cleaning interval . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69 5.2.3 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69 5.2.4 Deburring gauge blocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69 5.3 The comparative principle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70 5.3.1 Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71 5.4 Gauge block comparators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73 5.4.1 Scale and contact force control . . . . . . . . . . . . . . . . . . . . . . 75 5.4.2 Stylus force and penetration corrections . . . . . . . . . . . . . . . 75 5.4.3 Environmental factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77 5.4.3.1 5.4.3.2 Temperature effects . . . . . . . . . . . . . . . . . . . . 77 Control of temperature effects . . . . . . . . . . 79 5.5 Intercomparison procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80 5.5.1 Handling techniques . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81 5.6 Comparison designs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82 5.6.1 Drift eliminating designs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82 5.6.1.1 5.6.1.2 5.6.1.3 5.6.1.4 The 12/4 design . . . . . . . . . . . . . . . . . . . . . . . 82 The 6/3 design . . . . . . . . . . . . . . . . . . . . . . . . 83 The 8/4 design . . . . . . . . . . . . . . . . . . . . . . . . 84 The ABBA design . . . . . . . . . . . . . . . . . . . . . . 84 5.6.2 Example of calibration output using the 12/4 design . . . . . . 85 5.7 Current NIST system performance . . . . . . . . . . . . . . . . . . . . . . . . . 87 5.7.1 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89 6. Gauge block interferometry 6.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90 6.2 Interferometers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90 6.2.1 The Kosters type interferometer . . . . . . . . . . . . . . . . . . . . . . 91 4 6.2.2 The NPL interferometer . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93 6.2.3 Testing optical quality of interferometers . . . . . . . . . . . . . . . 95 6.2.4 Interferometer corrections . . . . . . . . . . . . . . . . . . . . . . . . . . 96 6.2.5 Laser light sources . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99 6.3 Environmental conditions and their measurement . . . . . . . . . . . . . 99 6.3.1 Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100 6.3.2 Atmospheric pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101 6.3.3 Water vapor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101 6.4 Gauge block measurement procedure . . . . . . . . . . . . . . . . . . . . . . 102 6.5 Computation of gauge block length . . . . . . . . . . . . . . . . . . . . . . . . . 104 6.5.1 Calculation of the wavelength . . . . . . . . . . . . . . . . . . . . . . . 104 6.5.2 Calculation of the whole number of fringes . . . . . . . . . . . . . 105 6.5.3 Calculation of the block length from observed data . . . . . . . 106 6.6 Type A and B errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107 6.7 Process evaluation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109 6.8 Multiple wavelength interferometry . . . . . . . . . . . . . . . . . . . . . . . . . 112 6.9 Use of the line scale interferometer for end standard calibration . . 114 7. References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117 Appendix A. Appendix B. Appendix C. Appendix D. Drift eliminating designs for non-simultaneous comparison calibrations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121 Wringing films . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134 Phase shifts in gauge block interferometry . . . . . . . . . . . . . . . . . . . 137 Deformation corrections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141 5 ... - tailieumienphi.vn
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