RECENT ADVANCES IN NANOFABRICATION TECHNIQUES AND APPLICATIONS_1

RECENT ADVANCES IN NANOFABRICATION TECHNIQUES AND APPLICATIONS Edited by Bo Cui Recent Advances in Nanofabrication Techniques and Applications Edited by Bo Cui Published by InTech Janeza Trdine 9, 51000 Rijeka, Croatia Copyright © 2011 InTech All chapters are Open Access distributed under the Creative Commons Attribution 3.0 license, which allows users to download, copy and build upon published articles even for commercial purposes, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications. After this work has been published by InTech, authors have the right to republish it, in whole or part, in any publication of which they are the author, and to make other personal use of the work. Any republication, referencing or personal use of the work must explicitly identify the original source. As for readers, this license allows users to download, copy and build upon published chapters even for commercial purposes, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications. Notice Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published chapters. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials, instructions, methods or ideas contained in the book. Publishing Process Manager Alenka Urbancic Technical Editor Teodora Smiljanic Cover Designer InTech Design Team Image Copyright 2011. Used under license from Shutterstock.com First published November, 2011 Printed in Croatia A free online edition of this book is available at www.intechopen.com Additional hard copies can be obtained from orders@intechweb.org Recent Advances in Nanofabrication Techniques and Applications, Edited by Bo Cui p. cm. 978-953-307-602-7 free online editions of InTech Books and Journals can be found at www.intechopen.com Contents Preface XI Part 1 Electron and Ion Beam Lithography 1 Chapter 1 Chapter 2 Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch 3 Sumio Hosaka Focused Ion Beam Lithography 27 Heinz D. Wanzenboeck and Simon Waid Chapter 3 Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam 51 Jianwu Zhang, Zhongping Wang and Zengming Zhang Chapter 4 Character Projection Lithography for Application-Specific Integrated Circuits 69 Makoto Sugihara Chapter 5 Transform-Based Lossless Image Compression Algorithm for Electron Beam Direct Write Lithography Systems 95 Jeehong Yang and Serap A. Savari Part 2 Nanoimprint and Soft Lithography 111 Chapter 6 Ultrafast Fabrication of Metal Nanostructures Using Pulsed Laser Melting 113 Bo Cui Chapter 7 Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale 139 Andrea Cattoni, Jing Chen, Dominique Decanini, Jian Shi and Anne-Marie Haghiri-Gosnet ... - tailieumienphi.vn