MICROMACHINING TECHNIQUES FOR FABRICATION OF MICRO AND NANO STRUCTURES

MICROMACHINING TECHNIQUES FOR FABRICATION OF MICRO AND NANO STRUCTURES Edited by Mojtaba Kahrizi Micromachining Techniques for Fabrication of Micro and Nano Structures Edited by Mojtaba Kahrizi Published by InTech Janeza Trdine 9, 51000 Rijeka, Croatia Copyright © 2011 InTech All chapters are Open Access distributed under the Creative Commons Attribution 3.0 license, which allows users to download, copy and build upon published articles even for commercial purposes, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications. After this work has been published by InTech, authors have the right to republish it, in whole or part, in any publication of which they are the author, and to make other personal use of the work. Any republication, referencing or personal use of the work must explicitly identify the original source. As for readers, this license allows users to download, copy and build upon published chapters even for commercial purposes, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications. Notice Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published chapters. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials, instructions, methods or ideas contained in the book. Publishing Process Manager Oliver Kurelic Technical Editor Teodora Smiljanic Cover Designer InTech Design Team First published January, 2012 Printed in Croatia A free online edition of this book is available at www.intechopen.com Additional hard copies can be obtained from orders@intechweb.org Micromachining Techniques for Fabrication of Micro and Nano Structures, Edited by Mojtaba Kahrizi p. cm. ISBN 978-953-307-906-6 free online editions of InTech Books and Journals can be found at www.intechopen.com Contents Preface IX Chapter 1 Chapter 2 Focused Ion Beam Based Three-Dimensional Nano-Machining 1 Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim Miniature Engineered Tapered Fiber Tip Devices by Focused Ion Beam Micromachining 17 Fei Xu, Jun-long Kou, Yan-qing Lu and Wei Hu Chapter 3 Fundamentals of Laser Ablation of the Materials Used in Microfluiducs 35 Tai-Chang Chen and Robert Bruce Darling Chapter 4 Microwave Meta-Material Absorbers Utilizing Laser Micro-Machining Technology 61 Hongmin Lee Chapter 5 Laser Micromachining and Micro-Patterning with a Nanosecond UV Laser 85 Xianghua Wang, Giuseppe Yickhong Mak and Hoi Wai Choi Chapter 6 Chapter 7 Chapter 8 Laser Ablation for Polymer Waveguide Fabrication 109 Shefiu S. Zakariyah Micro Eletro Discharge Milling for Microfabrication 131 Mohammad Yeakub Ali, Reyad Mehfuz, Ahsan Ali Khan and Ahmad Faris Ismail Mechanical Micromachining by Drilling, Milling and Slotting 159 T. Gietzelt and L. Eichhorn Chapter 9 ReleaseOptimizationofSuspendedMembranesinMEMS 183 Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal ... - tailieumienphi.vn