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NANO III Chapter: Micro- and nano-fabrication Michel Calame Institut für Physik, Klingelbergstrasse 82, 4056 Basel room: 1.20, 1st floor email: michel.calame@unibas.ch MC, Nano III, 24.04.04, 1 Outline • Introduction: overview, state of the art, semiconductor physics reminder • Fabrication basics – IC fabrication overview – clean-rooms – Silicon: from sand to wafer – material deposition techniques – lithography – etching – examples of devices: MEMS, NEMS • Outlook: new and future techniques MC, Nano III, 24.04.04, 2 References • overview books 1. Introduction to Semiconductor Manufacturing Technology H. Xiao, Prentice-Hall, 2001. 2. Fundamentals of Microfabrication: The Science of Miniaturization M. Madou, 2nd ed., CRC Press, 2002 3. Nanoelectronics and Information Technology R. Waser ed., Wiley-VCH, 2003 4. VLSI Technology (more physical) SM. Sze, 2nd ed., McGraw-Hill, 1988 • many web sites, e.g. www.memsnet.org/glossary see also companies web sites: Intel, Infineon, IBM, AMD, … MC, Nano III, 24.04.04, 3 Introduction 1947, 23th December John Bardeen, Walter Brattain, William Schockley ATT Bell Labs first point contact transfer resistor reconstitution: Aylesworth http://www.pbs.org/transistor/ MC, Nano III, 24.04.04, 4 Introduction 1958 Jack Kilby, Texas Instruments first IC (Integrated Circuit) C. Esser, Infineon MC, Nano III, 24.04.04, 5 Introduction 1961, Robert Noyce, Fairchild Camera first integrated circuit available as a monolithic chip Planar technology (Si substrate and Al lines) C. Esser, Infineon MC, Nano III, 24.04.04, 6 Introduction 1971 Intel anounces the i4004 microprocessor "a new era of integrated electronics" 2250 transistors, 10µmtechnology, 108kHz http://www.intel.com MC, Nano III, 24.04.04, 7 Introduction 1981 Intel i8088 29000 transistors, 3µmtechnology, 8MHz invention of the PC (personal computer) IBM, A.Child, B.Gates http://www.intel.com MC, Nano III, 24.04.04, 8 Introduction 1965, Gordon E. Moore (co-founder Intel Corporation) Prediction 1975: from 1980 on circuit density or capacity of semiconductor devices will double every two years instead of one year Electronics, Vol. 38(8) “The complexity for minimum component costs has increased at a rate of roughly a factor of two per year. Certainly over the short this rate can be expected to continue, if not increase. Over the longer term, the rate of increase is a bit more uncertain, although there is no reason to believe it will not remain nearly constant for at least 10 years.” http://www.pbs.org/transistor/ MC, Nano III, 24.04.04, 9 Introduction http://www.intel.com MC, Nano III, 24.04.04, 10 ... - tailieumienphi.vn
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