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NANO III
Chapter:
Micro- and nano-fabrication
Michel Calame
Institut für Physik, Klingelbergstrasse 82, 4056 Basel room: 1.20, 1st floor
email: michel.calame@unibas.ch
MC, Nano III, 24.04.04, 1
Outline
• Introduction:
overview, state of the art, semiconductor physics reminder
• Fabrication basics
– IC fabrication overview – clean-rooms
– Silicon: from sand to wafer
– material deposition techniques – lithography
– etching
– examples of devices: MEMS, NEMS
• Outlook: new and future techniques
MC, Nano III, 24.04.04, 2
References
• overview books
1. Introduction to Semiconductor Manufacturing Technology H. Xiao, Prentice-Hall, 2001.
2. Fundamentals of Microfabrication: The Science of Miniaturization M. Madou, 2nd ed., CRC Press, 2002
3. Nanoelectronics and Information Technology R. Waser ed., Wiley-VCH, 2003
4. VLSI Technology (more physical) SM. Sze, 2nd ed., McGraw-Hill, 1988
• many web sites, e.g. www.memsnet.org/glossary
see also companies web sites: Intel, Infineon, IBM, AMD, …
MC, Nano III, 24.04.04, 3
Introduction
1947, 23th December
John Bardeen, Walter Brattain, William Schockley
ATT Bell Labs first point contact transfer resistor
reconstitution: Aylesworth
http://www.pbs.org/transistor/ MC, Nano III, 24.04.04, 4
Introduction
1958
Jack Kilby, Texas Instruments first IC (Integrated Circuit)
C. Esser, Infineon MC, Nano III, 24.04.04, 5
Introduction
1961, Robert Noyce, Fairchild Camera
first integrated circuit available as a monolithic chip
Planar technology
(Si substrate and Al lines)
C. Esser, Infineon MC, Nano III, 24.04.04, 6
Introduction
1971 Intel anounces the i4004 microprocessor "a new era of integrated electronics"
2250 transistors, 10µmtechnology, 108kHz
http://www.intel.com MC, Nano III, 24.04.04, 7
Introduction
1981
Intel i8088
29000 transistors, 3µmtechnology, 8MHz
invention of the PC (personal computer)
IBM, A.Child, B.Gates
http://www.intel.com MC, Nano III, 24.04.04, 8
Introduction
1965, Gordon E. Moore
(co-founder Intel Corporation)
Prediction 1975:
from 1980 on circuit density or capacity of semiconductor devices will double every two years instead of one year
Electronics, Vol. 38(8)
“The complexity for minimum component costs has increased at a rate of roughly a factor of two per year. Certainly over the short this rate can be expected to continue, if not increase. Over the longer term, the rate of increase is a bit more uncertain, although there is no reason to believe it will not remain nearly constant for at least 10 years.”
http://www.pbs.org/transistor/ MC, Nano III, 24.04.04, 9
Introduction
http://www.intel.com MC, Nano III, 24.04.04, 10
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