Design and Simulation of Scanning Probe Micro-Cantilever for the Scanning probe lithography
Design and Simulation of Scanning Probe Micro-Cantilever for the Scanning probe lithography
In this paper, we report on design and simulation of a scanning probe micro-cantilever. The micro-cantilever consists of a sharp silicon tip integrated at the free end of the silicon fixed-free beam. The micro-cantilever is driven electrostatically using parallel plate capacitive-type actuation.